Semiconductor Technologies
by Jan Grym
Publisher: InTech 2010
ISBN-13: 9789533070803
Number of pages: 462
Description:
Contents: Semiconductor processes and devices modelling; Iterative Solution Method in Semiconductor Equations; Automation and Integration in Semiconductor Manufacturing; Contamination monitoring and analysis in semiconductor manufacturing; Advanced Plasma Processing: Etching, Deposition, and Wafer Bonding Techniques for Semiconductor Applications; etc.
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